Substrate effect on characteristics of PbZrxTi 1-xO3 (PZT) film

Chin Chi Cheng; San Lin Young; Hone Zern Chen; Sen Yeu Yang

doi:10.1080/10584587.2014.873321

Substrate effect on characteristics of PbZr_xTi _1-xO₃ (PZT) film

Chin Chi Cheng
, San Lin Young
, Hone Zern Chen
, Sen Yeu Yang

能源與冷凍空調工程系

研究成果: 期刊貢獻 › 文章 › 同行評審

7 引文斯高帕斯（Scopus）

摘要

The paper presents the effect of substrates on the characteristics of PbZr_xTi_1-xO₃ (PZT) thin film fabricated by sol-gel spin coating technology. The PZT sol-gel is prepared by mixing PZT powder and PZT solution, and fabricated on various substrates, including copper (Cu), alumina (Al₂O₃), stainless steel (SS) and titanium (Ti). The dielectric characteristics and orientation of films had been measured by SEM, LCR meter, XRD for comparison. The experimental results indicate that the substrates having the similar characteristics with PZT film would result in better crystallization, charge storage capacity and energy transfer efficiency of film.

原文	English
頁（從 - 到）	51-58
頁數	8
期刊	Integrated Ferroelectrics
卷	150
發行號	1
DOIs	https://doi.org/10.1080/10584587.2014.873321
出版狀態	Published - 2 1月 2014

文獻附註

Funding Information:
This work was sponsored by the national science council of the Republic of China under the grant No. NSC 101-2221-E-164-007.

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10.1080/10584587.2014.873321

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Link to publication in Scopus

引用此

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title = "Substrate effect on characteristics of PbZrxTi 1-xO3 (PZT) film",

abstract = "The paper presents the effect of substrates on the characteristics of PbZrxTi1-xO3 (PZT) thin film fabricated by sol-gel spin coating technology. The PZT sol-gel is prepared by mixing PZT powder and PZT solution, and fabricated on various substrates, including copper (Cu), alumina (Al2O3), stainless steel (SS) and titanium (Ti). The dielectric characteristics and orientation of films had been measured by SEM, LCR meter, XRD for comparison. The experimental results indicate that the substrates having the similar characteristics with PZT film would result in better crystallization, charge storage capacity and energy transfer efficiency of film.",

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author = "Cheng, \{Chin Chi\} and Young, \{San Lin\} and Chen, \{Hone Zern\} and Yang, \{Sen Yeu\}",

note = "Funding Information: This work was sponsored by the national science council of the Republic of China under the grant No. NSC 101-2221-E-164-007.",

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AU - Cheng, Chin Chi

AU - Young, San Lin

AU - Chen, Hone Zern

AU - Yang, Sen Yeu

N1 - Funding Information: This work was sponsored by the national science council of the Republic of China under the grant No. NSC 101-2221-E-164-007.

PY - 2014/1/2

Y1 - 2014/1/2

N2 - The paper presents the effect of substrates on the characteristics of PbZrxTi1-xO3 (PZT) thin film fabricated by sol-gel spin coating technology. The PZT sol-gel is prepared by mixing PZT powder and PZT solution, and fabricated on various substrates, including copper (Cu), alumina (Al2O3), stainless steel (SS) and titanium (Ti). The dielectric characteristics and orientation of films had been measured by SEM, LCR meter, XRD for comparison. The experimental results indicate that the substrates having the similar characteristics with PZT film would result in better crystallization, charge storage capacity and energy transfer efficiency of film.

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KW - orientation

KW - spin

KW - substrate

KW - thermal expansion coefficient

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Substrate effect on characteristics of PbZrxTi 1-xO3 (PZT) film

摘要

文獻附註

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Substrate effect on characteristics of PbZr_xTi _1-xO₃ (PZT) film