Single dielectric columnar thin film as a humidity sensor

Yi Jun Jen; Meng Jie Lin; Jung Hui Chao

doi:10.1016/j.snb.2010.06.029

Single dielectric columnar thin film as a humidity sensor

Yi Jun Jen
, Meng Jie Lin
, Jung Hui Chao

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研究成果: 期刊貢獻 › 文章 › 同行評審

4 引文斯高帕斯（Scopus）

摘要

In this work, a low dielectric columnar thin film is prepared by glancing angle deposition and adopted as a humidity sensor. The film can be arranged in a prism coupling system to enhance the polarization conversion (PC) reflectance in a manner that depends on the ambient humidity. The variations in the magnitude of reflectance and the spectrum peak with the humidity are measured and analyzed by effective medium approximation (EMA).

原文	English
頁（從 - 到）	67-70
頁數	4
期刊	Sensors and Actuators, B: Chemical
卷	149
發行號	1
DOIs	https://doi.org/10.1016/j.snb.2010.06.029
出版狀態	Published - 6 8月 2010

文獻附註

Funding Information:
The authors would like to thank the National Science Council of the Republic of China, Taiwan , for financially supporting this research under Contract No. NSC 96-2221-E-027-051-MY3 .

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10.1016/j.snb.2010.06.029

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AU - Lin, Meng Jie

AU - Chao, Jung Hui

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N2 - In this work, a low dielectric columnar thin film is prepared by glancing angle deposition and adopted as a humidity sensor. The film can be arranged in a prism coupling system to enhance the polarization conversion (PC) reflectance in a manner that depends on the ambient humidity. The variations in the magnitude of reflectance and the spectrum peak with the humidity are measured and analyzed by effective medium approximation (EMA).

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KW - Glancing angle deposition

KW - Humidity sensor

KW - Optical thin film

KW - Polarization conversion

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Single dielectric columnar thin film as a humidity sensor

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