Sensors made of carbon ceramic composite materials

Chun Hsi Su; Zhe Ming Zhang

doi:10.1016/j.matlet.2017.03.147

Sensors made of carbon ceramic composite materials

Chun Hsi Su
, Zhe Ming Zhang

機械工程系

研究成果: 期刊貢獻 › 文章 › 同行評審

5 引文斯高帕斯（Scopus）

摘要

Carbon nanotubes (CNTs) were deposited on barium titanate (BaTiO₃) substrates using the microwave plasma jet chemical vapor deposition (MPJCVD) system. Accelerometer sensors were then made of both as-obtained carbon ceramic (CNTs/BaTiO₃) composite materials and barium titanate (BaTiO₃). The variations of the output voltages under various accelerating amplitudes were examined on two kinds of sensors at vibrating frequencies of 200 Hz, 500 Hz, 800 Hz, and 2000 Hz, respectively. It is found that the output voltages and the sensitivity of CNTs/BaTiO₃ sensors were higher than those of BaTiO₃ sensors at each vibrating frequency.

原文	English
頁（從 - 到）	90-93
頁數	4
期刊	Materials Letters
卷	197
DOIs	https://doi.org/10.1016/j.matlet.2017.03.147
出版狀態	Published - 15 6月 2017

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© 2017 Elsevier B.V.

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10.1016/j.matlet.2017.03.147

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title = "Sensors made of carbon ceramic composite materials",

abstract = "Carbon nanotubes (CNTs) were deposited on barium titanate (BaTiO3) substrates using the microwave plasma jet chemical vapor deposition (MPJCVD) system. Accelerometer sensors were then made of both as-obtained carbon ceramic (CNTs/BaTiO3) composite materials and barium titanate (BaTiO3). The variations of the output voltages under various accelerating amplitudes were examined on two kinds of sensors at vibrating frequencies of 200 Hz, 500 Hz, 800 Hz, and 2000 Hz, respectively. It is found that the output voltages and the sensitivity of CNTs/BaTiO3 sensors were higher than those of BaTiO3 sensors at each vibrating frequency.",

keywords = "Accelerometer sensors, Carbon nanotubes, Ceramics, Composite materials, Microwave plasma jet",

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AU - Zhang, Zhe Ming

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N2 - Carbon nanotubes (CNTs) were deposited on barium titanate (BaTiO3) substrates using the microwave plasma jet chemical vapor deposition (MPJCVD) system. Accelerometer sensors were then made of both as-obtained carbon ceramic (CNTs/BaTiO3) composite materials and barium titanate (BaTiO3). The variations of the output voltages under various accelerating amplitudes were examined on two kinds of sensors at vibrating frequencies of 200 Hz, 500 Hz, 800 Hz, and 2000 Hz, respectively. It is found that the output voltages and the sensitivity of CNTs/BaTiO3 sensors were higher than those of BaTiO3 sensors at each vibrating frequency.

AB - Carbon nanotubes (CNTs) were deposited on barium titanate (BaTiO3) substrates using the microwave plasma jet chemical vapor deposition (MPJCVD) system. Accelerometer sensors were then made of both as-obtained carbon ceramic (CNTs/BaTiO3) composite materials and barium titanate (BaTiO3). The variations of the output voltages under various accelerating amplitudes were examined on two kinds of sensors at vibrating frequencies of 200 Hz, 500 Hz, 800 Hz, and 2000 Hz, respectively. It is found that the output voltages and the sensitivity of CNTs/BaTiO3 sensors were higher than those of BaTiO3 sensors at each vibrating frequency.

KW - Accelerometer sensors

KW - Carbon nanotubes

KW - Ceramics

KW - Composite materials

KW - Microwave plasma jet

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JF - Materials Letters

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Sensors made of carbon ceramic composite materials

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