Laser profilometer using a Fabry-Perot etalon and an objective

Shyh Tsong Lin; Sheng Lih Yeh; Yi Chun Wang; Meng Zhu Chen

doi:10.1016/j.sna.2013.08.001

Laser profilometer using a Fabry-Perot etalon and an objective

Shyh Tsong Lin
, Sheng Lih Yeh
, Yi Chun Wang
, Meng Zhu Chen

光電工程系

研究成果: 期刊貢獻 › 文章 › 同行評審

2 引文斯高帕斯（Scopus）

摘要

This paper introduces an innovative laser profilometer using a Fabry-Perot etalon and an objective. Following the derivation of the measurement theory, an experimental setup constructed to realize the profilometer is demonstrated, and the experimental results from the uses of this setup are then presented. The experimental setup has a sensitivity, vertical resolution, and stability of 1.62/μm, 2.2 nm, and 6.6 nm, respectively, and the experimental results agree not only the validity but also the feasibility of the proposed profilometer.

原文	English
頁（從 - 到）	47-51
頁數	5
期刊	Sensors and Actuators, A: Physical
卷	203
DOIs	https://doi.org/10.1016/j.sna.2013.08.001
出版狀態	Published - 2013

文獻附註

Funding Information:
The support of the National Science Council , Republic of China, under grant NSC 101-2221-E-027-103 is gratefully acknowledged.

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10.1016/j.sna.2013.08.001

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title = "Laser profilometer using a Fabry-Perot etalon and an objective",

abstract = "This paper introduces an innovative laser profilometer using a Fabry-Perot etalon and an objective. Following the derivation of the measurement theory, an experimental setup constructed to realize the profilometer is demonstrated, and the experimental results from the uses of this setup are then presented. The experimental setup has a sensitivity, vertical resolution, and stability of 1.62/μm, 2.2 nm, and 6.6 nm, respectively, and the experimental results agree not only the validity but also the feasibility of the proposed profilometer.",

keywords = "Fabry-Perot etalon, Laser profilometer, Objective",

author = "Lin, \{Shyh Tsong\} and Yeh, \{Sheng Lih\} and Wang, \{Yi Chun\} and Chen, \{Meng Zhu\}",

note = "Funding Information: The support of the National Science Council , Republic of China, under grant NSC 101-2221-E-027-103 is gratefully acknowledged. ",

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AU - Lin, Shyh Tsong

AU - Yeh, Sheng Lih

AU - Wang, Yi Chun

AU - Chen, Meng Zhu

N1 - Funding Information: The support of the National Science Council , Republic of China, under grant NSC 101-2221-E-027-103 is gratefully acknowledged.

PY - 2013

Y1 - 2013

N2 - This paper introduces an innovative laser profilometer using a Fabry-Perot etalon and an objective. Following the derivation of the measurement theory, an experimental setup constructed to realize the profilometer is demonstrated, and the experimental results from the uses of this setup are then presented. The experimental setup has a sensitivity, vertical resolution, and stability of 1.62/μm, 2.2 nm, and 6.6 nm, respectively, and the experimental results agree not only the validity but also the feasibility of the proposed profilometer.

AB - This paper introduces an innovative laser profilometer using a Fabry-Perot etalon and an objective. Following the derivation of the measurement theory, an experimental setup constructed to realize the profilometer is demonstrated, and the experimental results from the uses of this setup are then presented. The experimental setup has a sensitivity, vertical resolution, and stability of 1.62/μm, 2.2 nm, and 6.6 nm, respectively, and the experimental results agree not only the validity but also the feasibility of the proposed profilometer.

KW - Fabry-Perot etalon

KW - Laser profilometer

KW - Objective

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AN - SCOPUS:84884240639

SN - 0924-4247

VL - 203

SP - 47

EP - 51

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

ER -

Laser profilometer using a Fabry-Perot etalon and an objective

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