Energy consumption reduction and PFC emissions control in point of use wet-thermal-wet abatement of PECVD chamber cleaning

研究成果: 會議貢獻 › 文本 › 同行評審

原文	English
出版狀態	Published - 2017
事件	Advanced Filtration Technologies Conference, AFS Spring 2017 - Louisville, United States 持續時間: 10 4月 2017 → 13 4月 2017

Conference	Advanced Filtration Technologies Conference, AFS Spring 2017
國家/地區	United States
城市	Louisville
期間	10/04/17 → 13/04/17

UN SDG

此研究成果有助於以下永續發展目標

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title = "Energy consumption reduction and PFC emissions control in point of use wet-thermal-wet abatement of PECVD chamber cleaning",

author = "Hu, \{Shih Cheng\}",

year = "2017",

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note = "Advanced Filtration Technologies Conference, AFS Spring 2017 ; Conference date: 10-04-2017 Through 13-04-2017",

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T1 - Energy consumption reduction and PFC emissions control in point of use wet-thermal-wet abatement of PECVD chamber cleaning

AU - Hu, Shih Cheng

PY - 2017

Y1 - 2017

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AN - SCOPUS:85040085980

T2 - Advanced Filtration Technologies Conference, AFS Spring 2017

Y2 - 10 April 2017 through 13 April 2017

ER -