Skip to main navigation Skip to search Skip to main content

以感光型聚醯亞胺搭配光鹼釋出劑開發高韌性及高解析之鹼性顯影負型光阻

  • 曾翎雅 Tseng, Ling-Ya

Student thesis: Master's Thesis

Date of Award31 Jul 2019
Original languageChinese (Traditional)
Awarding Institution
  • Department of Molecular Science and Engineering
SupervisorChi-Ching Kuo (Supervisor)

Cite this

'