Substrate effect on characteristics of PbZrxTi 1-xO3 (PZT) film

Chin Chi Cheng; San Lin Young; Hone Zern Chen; Sen Yeu Yang

doi:10.1080/10584587.2014.873321

Substrate effect on characteristics of PbZr_xTi _1-xO₃ (PZT) film

Chin Chi Cheng
, San Lin Young
, Hone Zern Chen
, Sen Yeu Yang

Department of Energy and Refrigerating Air-Conditioning Engineering

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

The paper presents the effect of substrates on the characteristics of PbZr_xTi_1-xO₃ (PZT) thin film fabricated by sol-gel spin coating technology. The PZT sol-gel is prepared by mixing PZT powder and PZT solution, and fabricated on various substrates, including copper (Cu), alumina (Al₂O₃), stainless steel (SS) and titanium (Ti). The dielectric characteristics and orientation of films had been measured by SEM, LCR meter, XRD for comparison. The experimental results indicate that the substrates having the similar characteristics with PZT film would result in better crystallization, charge storage capacity and energy transfer efficiency of film.

Original language	English
Pages (from-to)	51-58
Number of pages	8
Journal	Integrated Ferroelectrics
Volume	150
Issue number	1
DOIs	https://doi.org/10.1080/10584587.2014.873321
State	Published - 2 Jan 2014

Bibliographical note

Funding Information:
This work was sponsored by the national science council of the Republic of China under the grant No. NSC 101-2221-E-164-007.

Keywords

PZT film
dielectric
orientation
spin
substrate
thermal expansion coefficient

Access to Document

10.1080/10584587.2014.873321

Cite this

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title = "Substrate effect on characteristics of PbZrxTi 1-xO3 (PZT) film",

abstract = "The paper presents the effect of substrates on the characteristics of PbZrxTi1-xO3 (PZT) thin film fabricated by sol-gel spin coating technology. The PZT sol-gel is prepared by mixing PZT powder and PZT solution, and fabricated on various substrates, including copper (Cu), alumina (Al2O3), stainless steel (SS) and titanium (Ti). The dielectric characteristics and orientation of films had been measured by SEM, LCR meter, XRD for comparison. The experimental results indicate that the substrates having the similar characteristics with PZT film would result in better crystallization, charge storage capacity and energy transfer efficiency of film.",

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AU - Cheng, Chin Chi

AU - Young, San Lin

AU - Chen, Hone Zern

AU - Yang, Sen Yeu

N1 - Funding Information: This work was sponsored by the national science council of the Republic of China under the grant No. NSC 101-2221-E-164-007.

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AB - The paper presents the effect of substrates on the characteristics of PbZrxTi1-xO3 (PZT) thin film fabricated by sol-gel spin coating technology. The PZT sol-gel is prepared by mixing PZT powder and PZT solution, and fabricated on various substrates, including copper (Cu), alumina (Al2O3), stainless steel (SS) and titanium (Ti). The dielectric characteristics and orientation of films had been measured by SEM, LCR meter, XRD for comparison. The experimental results indicate that the substrates having the similar characteristics with PZT film would result in better crystallization, charge storage capacity and energy transfer efficiency of film.

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