Single dielectric columnar thin film as a humidity sensor

Yi Jun Jen; Meng Jie Lin; Jung Hui Chao

doi:10.1016/j.snb.2010.06.029

Single dielectric columnar thin film as a humidity sensor

Yi Jun Jen
, Meng Jie Lin
, Jung Hui Chao

Department of Electro-Optical Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

In this work, a low dielectric columnar thin film is prepared by glancing angle deposition and adopted as a humidity sensor. The film can be arranged in a prism coupling system to enhance the polarization conversion (PC) reflectance in a manner that depends on the ambient humidity. The variations in the magnitude of reflectance and the spectrum peak with the humidity are measured and analyzed by effective medium approximation (EMA).

Original language	English
Pages (from-to)	67-70
Number of pages	4
Journal	Sensors and Actuators, B: Chemical
Volume	149
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2010.06.029
State	Published - 6 Aug 2010

Bibliographical note

Funding Information:
The authors would like to thank the National Science Council of the Republic of China, Taiwan , for financially supporting this research under Contract No. NSC 96-2221-E-027-051-MY3 .

Keywords

GLAD
Glancing angle deposition
Humidity sensor
Optical thin film
Polarization conversion

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10.1016/j.snb.2010.06.029

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abstract = "In this work, a low dielectric columnar thin film is prepared by glancing angle deposition and adopted as a humidity sensor. The film can be arranged in a prism coupling system to enhance the polarization conversion (PC) reflectance in a manner that depends on the ambient humidity. The variations in the magnitude of reflectance and the spectrum peak with the humidity are measured and analyzed by effective medium approximation (EMA).",

keywords = "GLAD, Glancing angle deposition, Humidity sensor, Optical thin film, Polarization conversion",

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AU - Jen, Yi Jun

AU - Lin, Meng Jie

AU - Chao, Jung Hui

N1 - Funding Information: The authors would like to thank the National Science Council of the Republic of China, Taiwan , for financially supporting this research under Contract No. NSC 96-2221-E-027-051-MY3 .

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Y1 - 2010/8/6

N2 - In this work, a low dielectric columnar thin film is prepared by glancing angle deposition and adopted as a humidity sensor. The film can be arranged in a prism coupling system to enhance the polarization conversion (PC) reflectance in a manner that depends on the ambient humidity. The variations in the magnitude of reflectance and the spectrum peak with the humidity are measured and analyzed by effective medium approximation (EMA).

AB - In this work, a low dielectric columnar thin film is prepared by glancing angle deposition and adopted as a humidity sensor. The film can be arranged in a prism coupling system to enhance the polarization conversion (PC) reflectance in a manner that depends on the ambient humidity. The variations in the magnitude of reflectance and the spectrum peak with the humidity are measured and analyzed by effective medium approximation (EMA).

KW - GLAD

KW - Glancing angle deposition

KW - Humidity sensor

KW - Optical thin film

KW - Polarization conversion

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JO - Sensors and Actuators, B: Chemical

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IS - 1

ER -

Single dielectric columnar thin film as a humidity sensor

Abstract

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Keywords

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