Abstract
Compensations for cross-axis coupling effect and hysteretic nonlinearity of a novel XY piezo-actuated positioning stage are presented in this study. The piezo-actuated stage utilizes a monolithic flexure-based mechanism (FBM) to achieve translations in X- and Y-axes instead of using stacked mechanisms. A hysteresis model with crossover term is proposed to alleviate the cross coupling effect between X- and Y-stages during precision positioning tasks. System identifications using real-coded genetic algorithm (RGA) and clonal selection algorithm (CSA) are compared with particle swarm optimization (PSO). The results show that PSO provides better performance than the others. Therefore, a feedforward controller with cross-axis coupling compensation is studied and the used for the piezo-actuated FBM to enhance the precision of the coarse positioning stage. The experimental results confirm that the proposed controller can achieve precision tracking tasks with submicron precision.
| Original language | English |
|---|---|
| Pages (from-to) | 614-628 |
| Number of pages | 15 |
| Journal | Mechatronics |
| Volume | 22 |
| Issue number | 5 |
| DOIs | |
| State | Published - Aug 2012 |
Bibliographical note
Funding Information:This work is supported by the National Science Council under Grant NSC100-2221-E-027-031 and the Ministry of Economic Affairs, ROC under Grant 98-EC-17-A-16-S1-127.
Keywords
- Clonal selection algorithm
- Flexure-based mechanism
- Particle swarm optimization
- Piezoelectric actuator
- Real-coded genetic algorithm
- System identification
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