Hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguides

A. K. Chu; K. M. Lee; B. J. Pong; C. J. Lin; W. J. Ho; T. T. Shih

doi:10.1049/el:20001096

Hybrid polyimide/Ta₂O₅/polyimide antiresonant reflecting optical waveguides

A. K. Chu
, K. M. Lee
, B. J. Pong
, C. J. Lin
, W. J. Ho
, T. T. Shih

Department of Electro-Optical Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A hybrid polyimideTa₂O₅/polyimide antiresonant reflecting optical waveguide (ARROW) is presented. The ARROW consists of fluorinated polyimide and tantalum pentoxide hybrid layers deposited on Si substrates. The propagation losses of the device are 0.6 and 2.6 dB/cm at 1.3 μm for TE and TM polarized lights, respectively.

Original language	English
Pages (from-to)	1539-1540
Number of pages	2
Journal	Electronics Letters
Volume	36
Issue number	18
DOIs	https://doi.org/10.1049/el:20001096
State	Published - 31 Aug 2000

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10.1049/el:20001096

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abstract = "A hybrid polyimideTa2O5/polyimide antiresonant reflecting optical waveguide (ARROW) is presented. The ARROW consists of fluorinated polyimide and tantalum pentoxide hybrid layers deposited on Si substrates. The propagation losses of the device are 0.6 and 2.6 dB/cm at 1.3 μm for TE and TM polarized lights, respectively.",

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AU - Chu, A. K.

AU - Lee, K. M.

AU - Pong, B. J.

AU - Lin, C. J.

AU - Ho, W. J.

AU - Shih, T. T.

PY - 2000/8/31

Y1 - 2000/8/31

N2 - A hybrid polyimideTa2O5/polyimide antiresonant reflecting optical waveguide (ARROW) is presented. The ARROW consists of fluorinated polyimide and tantalum pentoxide hybrid layers deposited on Si substrates. The propagation losses of the device are 0.6 and 2.6 dB/cm at 1.3 μm for TE and TM polarized lights, respectively.

AB - A hybrid polyimideTa2O5/polyimide antiresonant reflecting optical waveguide (ARROW) is presented. The ARROW consists of fluorinated polyimide and tantalum pentoxide hybrid layers deposited on Si substrates. The propagation losses of the device are 0.6 and 2.6 dB/cm at 1.3 μm for TE and TM polarized lights, respectively.

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JO - Electronics Letters

JF - Electronics Letters

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ER -

Hybrid polyimide/Ta₂O₅/polyimide antiresonant reflecting optical waveguides

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