Energy consumption reduction and PFC emissions control in point of use wet-thermal-wet abatement of PECVD chamber cleaning

Research output: Contribution to conference › Paper › peer-review

Original language	English
State	Published - 2017
Event	Advanced Filtration Technologies Conference, AFS Spring 2017 - Louisville, United States Duration: 10 Apr 2017 → 13 Apr 2017

Conference	Advanced Filtration Technologies Conference, AFS Spring 2017
Country/Territory	United States
City	Louisville
Period	10/04/17 → 13/04/17

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

@conference{ec13285a0bc34f4fa25f8d10130937da,

title = "Energy consumption reduction and PFC emissions control in point of use wet-thermal-wet abatement of PECVD chamber cleaning",

author = "Hu, \{Shih Cheng\}",

year = "2017",

language = "???core.languages.en\_GB???",

note = "Advanced Filtration Technologies Conference, AFS Spring 2017 ; Conference date: 10-04-2017 Through 13-04-2017",

}

TY - CONF

T1 - Energy consumption reduction and PFC emissions control in point of use wet-thermal-wet abatement of PECVD chamber cleaning

AU - Hu, Shih Cheng

PY - 2017

Y1 - 2017

UR - https://www.scopus.com/pages/publications/85040085980

M3 - ???researchoutput.researchoutputtypes.contributiontoconference.paper???

AN - SCOPUS:85040085980

T2 - Advanced Filtration Technologies Conference, AFS Spring 2017

Y2 - 10 April 2017 through 13 April 2017

ER -