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Design analysis of a belt furnace for microelectronic ceramic package processing

Research output: Contribution to specialist publicationArticle

2 Scopus citations

Abstract

A study was conducted on the effects of belt speed and flow rate of purging gasses on energy dissipation and transport and the temperature distribution inside a belt furnace used for ceramic package processing. Thus, knowledge of the thermal system leads to optimal thermal management for the firing process, which can assure the quality and reliability of the microelectronic package substrates. This paper analyzes the effects of radiative and convective heat transfers on the substrates and to evaluate their thermal response in a dynamic conveying belt furnace during the heating process.

Original languageEnglish
Pages43-48
Number of pages6
Volume80
No10
Specialist publicationAmerican Ceramic Society Bulletin
StatePublished - Oct 2001

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