Anisotropic optical property of an asymmetric bideposition Ta 2O5 film: Fabrication and measurement

Yi Jun Jen; Chia Feng Lin; Tai Hung Yu; Chun Jung Lai

doi:10.1117/12.894331

Anisotropic optical property of an asymmetric bideposition Ta ₂O₅ film: Fabrication and measurement

Yi Jun Jen
, Chia Feng Lin
, Tai Hung Yu
, Chun Jung Lai

Department of Electro-Optical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

To develop diverse anisotropic thin films, asymmetric bideposition technique is introduced to fabricate tilt columnar Ta₂O₅ films with biaxial optical property. The asymmetric bideposition is achieved using two different opposite deposition angles (a₊,a_-) and two different thicknesses of opposite deposited subdeposits. The two sets of Ta₂O₅ columnar thin films associated with deposited subdeposits (d+,d-)=(5.2,2.8) are prepared at the opposite deposition angles (a₊,a_-)=(70,-40), (75,-40), (80,-40) and at the opposite deposition angles (a₊,a_-)=(70,-50), (75,-50), (80,-50). Columnar thin films with various column angle and biaxial properties are measured their planar birefringence and three principal indexes. The larger column angle leads to higher principal indices. It is demonstrated that the asymmetric bideposition can enhance the birefringence of a tilted columnar thin film.

Original language	English
Title of host publication	Nanostructured Thin Films IV
DOIs	https://doi.org/10.1117/12.894331
State	Published - 2011
Event	Nanostructured Thin Films IV - San Diego, CA, United States Duration: 23 Aug 2011 → 25 Aug 2011

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8104
ISSN (Print)	0277-786X

Conference

Conference	Nanostructured Thin Films IV
Country/Territory	United States
City	San Diego, CA
Period	23/08/11 → 25/08/11

Keywords

anisotropic thin film
bideposition
polarization conversion
the principal indices

Access to Document

10.1117/12.894331

Cite this

@inproceedings{d3f89aed6ee04b21bb97de53f1c5ee41,

title = "Anisotropic optical property of an asymmetric bideposition Ta 2O5 film: Fabrication and measurement",

abstract = "To develop diverse anisotropic thin films, asymmetric bideposition technique is introduced to fabricate tilt columnar Ta2O5 films with biaxial optical property. The asymmetric bideposition is achieved using two different opposite deposition angles (a+,a-) and two different thicknesses of opposite deposited subdeposits. The two sets of Ta2O5 columnar thin films associated with deposited subdeposits (d+,d-)=(5.2,2.8) are prepared at the opposite deposition angles (a+,a-)=(70,-40), (75,-40), (80,-40) and at the opposite deposition angles (a+,a-)=(70,-50), (75,-50), (80,-50). Columnar thin films with various column angle and biaxial properties are measured their planar birefringence and three principal indexes. The larger column angle leads to higher principal indices. It is demonstrated that the asymmetric bideposition can enhance the birefringence of a tilted columnar thin film.",

keywords = "anisotropic thin film, bideposition, polarization conversion, the principal indices",

author = "Jen, \{Yi Jun\} and Lin, \{Chia Feng\} and Yu, \{Tai Hung\} and Lai, \{Chun Jung\}",

year = "2011",

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isbn = "9780819487148",

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note = "Nanostructured Thin Films IV ; Conference date: 23-08-2011 Through 25-08-2011",

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Jen, YJ, Lin, CF, Yu, TH & Lai, CJ 2011, Anisotropic optical property of an asymmetric bideposition Ta ₂O₅ film: Fabrication and measurement. in Nanostructured Thin Films IV., 810417, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8104, Nanostructured Thin Films IV, San Diego, CA, United States, 23/08/11. https://doi.org/10.1117/12.894331

Anisotropic optical property of an asymmetric bideposition Ta ₂O₅ film: Fabrication and measurement. / Jen, Yi Jun; Lin, Chia Feng; Yu, Tai Hung et al.
Nanostructured Thin Films IV. 2011. 810417 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8104).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - To develop diverse anisotropic thin films, asymmetric bideposition technique is introduced to fabricate tilt columnar Ta2O5 films with biaxial optical property. The asymmetric bideposition is achieved using two different opposite deposition angles (a+,a-) and two different thicknesses of opposite deposited subdeposits. The two sets of Ta2O5 columnar thin films associated with deposited subdeposits (d+,d-)=(5.2,2.8) are prepared at the opposite deposition angles (a+,a-)=(70,-40), (75,-40), (80,-40) and at the opposite deposition angles (a+,a-)=(70,-50), (75,-50), (80,-50). Columnar thin films with various column angle and biaxial properties are measured their planar birefringence and three principal indexes. The larger column angle leads to higher principal indices. It is demonstrated that the asymmetric bideposition can enhance the birefringence of a tilted columnar thin film.

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