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以微波電漿束化學氣相沉積系統進行合成大面積鑽石薄膜之裝置、方法及其製成品

  • 蘇 春 (Inventor)

Research output: Patent

Original languageChinese (Traditional)
Patent numberI429778
StatePublished - 11 Mar 2014

Patent Type

發明專利

Country

國內

Date of Patent

11/03/2014

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